Kayex KX260 Crystal Growing Furnace
KX260 Overview
The Kayex KX260 Silicon Crystal Growing furnace is optimized for growing silicon ingots up to 400 mm in diameter using advanced control systems technology and complete thermal management system.
Performance
| Typical Ingot Diameter | 305-405 mm (12-16 in) |
|---|---|
| Pull Chamber Door Opening | 508 x 2,362 mm (20 x 93 in) |
| Throat Diameter | 457 mm (18 in) |
| Seed Lift Rate | 0-508 mm/hr |
| Seed Jog Speed (Nominal) | 508 mm/min |
| Total Crucible Travel | 280 mm (19.6 in ) |
| Crucible Lift Rate | 0-254 mm/hr |
| Crucible Jog Speed (Nominal) | 50.8 mm/min |
| Seed Rotation (Reversible) | 0-35 rpm |
| Crucible Rotation (Reversible) | 0-20 rpm |
| Vacuum Pumps Main | 14,200 l/min (300 cfm) |
| (Min. recommended) Aux | 1,700 l/min (50 cfm) |
Silicon Charge Capacity
| Crucible Diameter* | Crucible Height* | Charge Size Cold Pack | Enhanced Charge** |
|---|---|---|---|
| 28.0 in | 17.0 in | 240 kg | 300 kg |
| 24.0 in | 16.33 in | 150 kg | 180 kg |
*Hot Zones available to fit following crucible sizes
**Charges can be enhanced with Xtramelt™ Feeder
Utility Requirements
| Power Supply | 350 kVA |
|---|
| Water | |
| Maximum Inlet | 25°C (77°F) |
|---|---|
| Minimum Flow Rate | 295 l/min (78 gpm) total |
| Diff. Supply Pressure | 38 psi (2.1 kg/cm2) |
| Argon | |
| Mass Flow Control (max.) | 200 slpm |
|---|---|
| Purge Flow | 100 slpm |
| Facility Total | 300 slpm |
| Recommended Supply Pressure | 6.3 bar (90 psi) |
| Air | |
| Recommended Supply Pressure | 6.3 bar (90 psi) |
|---|
Dimensions
| Height | 7.34 m (289 in) |
|---|---|
| Width | 3.96 m (156 in) |
| Depth | 3.58 m (141 in) |
| Weight | 10,000 kg (22,000 lb) |
