Kayex KX110 Crystal Growing Furnace
KX110 Overview
The Kayex KX110 Crystal Growing furnace is optimized for growing silicon and germanium ingots between 6" and 8" in diameter using advanced control systems technology and complete thermal management system.
Performance
| Typical Ingot Diameter | 150-205 mm (6-8 in) |
|---|---|
| Pull Chamber Height | 2,000 mm (79 in) |
| Throat Diameter | 305 mm (12 in) |
| Seed Lift Rate | 0-508 mm/hr |
| Seed Jog Speed (Nominal) | 508 mm/min |
| Total Crucible Travel | 380 mm (15 in ) |
| Crucible Lift Rate | 0-254 mm/hr |
| Crucible Jog Speed (Nominal) | 50.8 mm/min |
| Seed Rotation (Reversible) | 0-50 rpm |
| Crucible Rotation (Reversible) | 0-20 rpm |
| Vacuum Pumps Main | 5,660 l/min (200 cfm) |
| (Min. recommended) Aux | 990 l/min (35 cfm) |
Silicon Charge Capacity
| Crucible Diameter* | Crucible Height* | Charge Size Cold Pack | Enhanced Charge** |
|---|---|---|---|
| 20.0 in | 16.33 in | 100 kg | 120 kg |
*Hot Zones available to fit following crucible sizes
**Charges can be enhanced with Xtramelt™ Feeder
Utility Requirements
| Power Supply | 190 kVA |
|---|
| Water | |
| Maximum Inlet | 25°C (77°F) |
|---|---|
| Minimum Flow Rate | 190 l/min (50 gpm) total |
| Diff. Supply Pressure | 38 psi (2.1 kg/cm2) |
| Argon | |
| Mass Flow Control (max.) | 100 slpm |
|---|---|
| Purge Flow | 75 slpm |
| Facility Total | 175 slpm |
| Recommended Supply Pressure | 5.2 bar (75 psi) |
| Air | |
| Recommended Supply Pressure | 6.2 bar (90 psi) |
|---|
Dimensions
| Height | 6.26 m (247 in) |
|---|---|
| Width | 1.94 m (76 in) |
| Depth | 1.66 m (65 in) |
| Weight | 5,000 kg (11,000 lb) |
