Kayex CG6000 Crystal Growing Furnace
CG6000 Overview
The Kayex CG6000 Crystal Growing furnace is capable of growing silicon and germanium ingots up to 6 inches in diameter using advanced control systems technology and complete thermal management system.
Performance
| Typical Ingot Diameter | 150 mm (6 in) |
|---|---|
| Pull Chamber Height | 1,727 mm (68 in) |
| Throat Diameter | 254 mm (10 in) |
| Seed Lift Rate | 0-508 mm/hr |
| Seed Jog Speed (Nominal) | 508 mm/min |
| Total Crucible Travel | 292 mm (11.5 in ) |
| Crucible Lift Rate | 0-254 mm/hr |
| Crucible Jog Speed (Nominal) | 50.8 mm/min |
| Seed Rotation (Reversible) | 0-50 rpm |
| Crucible Rotation (Reversible) | 0-20 rpm |
| Vacuum Pumps Main | 3,030 l/min (107 cfm) |
| (Min. recommended) Aux | 594 l/min (21 cfm) |
Silicon Charge Capacity
| Crucible Diameter* | Crucible Height* | Charge Size Cold Pack | Enhanced Charge** |
|---|---|---|---|
| 18.0 in | 13.5 in | 60 kg | 75 kg |
*Hot Zones available to fit following crucible sizes **Charges can be enhanced with Xtramelt™ Feeder
Utility Requirements
| Power Supply | 190 kVA |
|---|
| Water | |
| Maximum Inlet | 25°C (77°F) |
|---|---|
| Minimum Flow Rate | 190 l/min (50 gpm) total |
| Diff. Supply Pressure | 38 psi (2.7 kg/cm2) |
| Argon | |
| Mass Flow Control (max.) | 100 slpm |
|---|---|
| Purge Flow | 75 slpm |
| Facility Total | 175 slpm |
| Recommended Supply Pressure | 5.2 bar (75 psi) |
| Air | |
| Recommended Supply Pressure | 6.2 bar (90 psi) |
|---|
Dimensions
| Height | 5.22 m (206 in) |
|---|---|
| Width | 1.91 m (75 in) |
| Depth | 2.76 m (109 in) |
| Weight | 4,550 kg (10,000 lb) |
