KX110 Solar Silicon Crystal Growing Furnace
KX110 Solar Silicon Crystal Growing Furnace
|
KX110 Overview
- Maximizing Solar Silicon Output
- Minimizing Cost
- 20-Inch Hot Zone Capability
Performance
| Typical Ingot Diameter |
150-200 mm (6-8") |
| Pull Chamber Height |
2000 mm (79”) |
| Throat Diameter |
305 mm (12”) |
| Furnace Diatemer |
900 mm |
| Seed Lift Rate |
0-508 mm/hr |
| Seed Jog Speed (Nominal) |
508 mm/min |
| Total Crucible Travel |
380 mm (15") |
| Crucible Lift Rate |
0-254 mm/hr |
| Crucible
Jog Speed (Nominal) |
50.8 mm/min |
| Seed Rotation (Reversible) |
0-50 rpm |
| Crucible Rotation (Reversible) |
0-20 rpm |
| Vacuum Pumps Main |
5660 l/min (200 cfm) |
| (Min. recommended) Aux |
990 l/min (35 cfm) |
Silicon Charge Capacity
Hot zones are available to fit the following crucible sizes. Charges can be enhanced with a feeder.
Crucible
Diameter
|
Crucible
Height
|
Charge Size Cold Pack
|
Enhanced Charge
|
| 20.0 in |
15.0 in |
100 kg |
125 kg |
Utility Requirements
| Electrical Furnace: |
190 kVA, 380 / 400 / 440 / 460 ±10% VAC 3 Ø
50/60 Hz, fused for 375 / 350 / 325 / 300 A
|
| Coolant Water |
| Maximum Inlet Temperature |
25°C (77°F) |
| Minimum Flow Rate |
190 l/min (50 gpm) total |
| Diff. Supply Pressure |
38 psi (2.7 kg/cm2) |
| Argon |
| Mass Flow Control (Max.) |
100 slpm |
| Purge Flow |
75 slpm |
| Facility Total |
175 slpm |
| Recommended Supply Pressure |
5.2 bar (75 psi) |
| Air |
| Recommended Supply Pressure |
6.2 bar (90 psi) |
Dimensions
| |
Furnace Overall
|
Control Console
|
Power Supply
|
| Height |
6.26m (247 in) |
1.60 m (63 in) |
0.98 m (39 in) |
| Width |
2.90 m (114 in) |
0.66 m (26 in) |
0.77 m (31 in) |
| Depth |
2.76 m (109 in) |
0.91 m (36 in) |
1.12 m (44 in) |
| Weight |
5,000 kg |
(11,000 lb) |
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