Kayex FX120 Silicon Crystal Growing Furnace
FX120 6-8 inch ingot silicon crystal growing furnace
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The Kayex FX120 Silicon Crystal Growing furnace is capable of growing
silicon ingots up to 8 inches in diameter.
Performance
| Typical Ingot Diameter |
6 - 8 in. (150 -
200 mm) |
| Standard Ingot Pull Length |
83 in.
(2100 mm) |
| Isolation Value Opening |
12"
(305 mm) |
| Pull Speed Range* |
0.1
- 10.0 minimum
(0.1 - 2.3 in/hr) |
| Seed Jog Speed (Nominal) |
24 in/min
(610 mm/min) |
| Crucible Lift Stroke |
20 in.
(508 mm) |
| Crucible Lift Rate |
0-10
in/hr (0-254 mm/hr) |
|
|
| Seed Rotation* (Reversible) |
1-25
rpm |
| Crucible Rotation* (Reversible) |
1-25
rpm |
|
|
Vacuum Pumps
(Recommended) |
Main
Aux |
|
221 cfm
(6260 l/min)
60 cfm (1700 l/min) |
| * Software Controlled Limit | |
Silicon Charge Capacity
Standard Hot Zones for the FX150 are
available to fit the following crucible size:
| Crucible Diameter |
Crucible Height |
Charge Size
Cold Pack |
| 18 inches |
13.5
inches |
60 kg |
| 22 inches |
15.12 inches |
100 kg |
| 24 inches |
14.96
inches |
150 kg |
|
|
|
Utility Requirements
Electrical
Furnace:
Rate excludes
optional equipment such as vacuum pumps and a magnet power supply. |
380 / 460 ±10% VAC.
3 PHASE 50/60 Hz, 600 amps |
| Coolant
Water |
| Maximum
Inlet Temperature |
86ºF
(30ºC) |
| Minimum
Flow Rate |
120 gpm (454 l/min)
total |
| Minimum inlet to outlet differential |
45.5
psi (3.3 kg/cm2) |
| Max.
Supply Pressure |
60
psi (5.6 kg/cm2) |
| Argon |
| Mass
Flow Control (Max.) |
200 slpm |
| Recommended
Supply Pressure |
40 psi (2.8 kg/cm2) |
| Required Number of Mass Flow Controllers |
2 |
| Air |
| Recommended
Supply Pressure |
80 - 100 psi (5.64 - 7.05 kg/cm2) |
Dimensions
| |
Furnace
Overall |
Control
Enclosure |
Power
Supply
(Heater) |
| Height |
288 in
(7.32 m) |
67 in
(1.70 m) |
80 in
(2.03 m) |
| Width |
80
in (2.03 m) |
23
in (0.59 m) |
40
in (1.02 m) |
| Depth |
80 in
(2.03 m) |
24 in
(0.60 m) |
78 in
(1.98 m) |
| Weight |
17,640
lbs
(8,000 kg) |
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FX120 Control System
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